AN ATTEMPT AT DEVELOPMENT OF A MAGNETIC-LEVITATION TRANSPORT-SYSTEM IN VACUUM USING THE MECHANISM OF INDUCED REPULSIVE FORCE

It is now necessary to make dust-free and contactless transporting sys tems, for instance, in the field of manufacturing semiconductor memori es which are becoming more and more integrated. Due to these circumsta nces, we have developed a basic mechanism of non- contact transport sy stem in vacuum which utilizes the induced repulsive levitation force b y alternating magnetic field and the propulsion force of linear motors . In this system, the aluminum transport carrier can be isolated from electromagnets by a stainless steel vacuum tunnel. Levitation of carri er is self-stabilized due to the cross-shape. The system configuration is extremely simple as compared with a conventional active controlled type system. At the present stage of development, the load carrying c apacity is about 100 g and the maximum transport velocity is 0.4 m s-1 for a levitation height of about 10 mm and a carrier weight of 300 g.