K. Zach et al., LASER-ABLATED YBCO THIN-FILMS - RELATIONS BETWEEN STRUCTURAL AND ELECTRICAL-PROPERTIES, Journal of alloys and compounds, 195(1-2), 1993, pp. 199-202
YBCO thin films were prepared by laser ablation with a KrF-excimer las
er (248 nm) on (100) SrTiO3-substrates. The aim of this work was to ge
t smooth YBCO films with good superconducting properties for use in si
ngle-layer or multilayer Josephson elements. To study the relations be
tween electrical and structural properties the influence of ablation p
arameters like oxygen partial pressure (P(O2)), substrate temperature
(T(s)) and target to substrate distance (d) were investigated. To anal
yse the films X-ray diffraction, Rutherford backscattering (RBS) and S
canning electron microscopy (SEM) were used.We found a strong reproduc
ible correlation between the position of the samples in the p(O2)-T(s)
-diagram and their structural and electrical properties like c-axis or
ientation (FWHM of best samples < 0, 15-degrees), c-axis length, outgr
owth density, critical temperature (T(Coff), for R=0) and current dens
ity at 77 K. The surface morphology strong correlates to the investiga
ted parameters. In a parameter region of p(O2) approximately 70 Pa, T(
s) approximately 720-degrees-C and d=4 cm we found outgrowth free smoo
th films with good superconducting properties. The results on single f
ilms were used to produce multilayer systems of YBCO-SrTiO3-YBCO on (1
00) SrTiO3-substrates.