YBaCuO thin films grown using the in situ laser ablation deposition te
chnique, were studied using several complementary analyses : X-ray dif
fraction, RBS in channeling geometry and micro Raman spectrometry, in
order to obtain complementary data on the crystalline quality of the f
ilms and on the nature of the intrinsic defects due to the growth proc
ess or induced by the RBS analysis.