We report on the growth of SrCuO2 thin films prepared by RF reactive m
agnetron sputtering onto (100) SrTiO3 substrates. Epitaxial (001) SrCu
O2 films are obtained at 550-degrees-C in a sputtering pressure of 1-1
0m Torr of Ar. Off axis x-ray analysis reveals perfect in plane orderi
ng. We find, depending on the preparation conditions, changes in the c
-axis value, which may be due to a change in the Sr-Cu-O concentration
s. These modifications are correlated to changes in the resistivity of
the films.