To measure grain orientation in SEM with high accuracy a new EBSP cali
bration software is developed. Grain orientation determination is simp
ly based on marking three zone axes in the live EBSP. The EBSP-techniq
ue has been applied to study misorientation between subgrains in high
purity and commercially pure aluminium. The lattice curvatures, which
develop during deformation, increase with the amount of deformation. D
uring annealing the subgrains grow, resulting in an increased average
neighbouring misorientation due to misorientation accumulation.