A UNIFIED PROCESS AND DEVICE SIMULATION SYSTEM - P-AND-D WORKBENCH

This paper describes a unified process and device simulation system na med P&D Workbench. P&D Workbench is a distributed processing system th at connects EWSs (Engineering Workstations) and MFCs (Mainframe Comput ers) via TCP/IP-based networks. P&D Workbench provides two-dimensional process, device, topography and capacitance simulation capabilities. Since P&D Workbench has a supervisor, database and excellent Japanese graphical user interface, handling time can be dramatically reduced. T he supervisor controls the simulation sequence and file transfer, and manages jobs and files both on EWSs and MFCs, so that plural simulatio ns under splitting conditions can be automatically executed. Short TAT (Turn Around Time) is achieved by selecting an appropriate platform d epending on the problem size and CPU loads. The effects of P&D Workben ch are shown in examples applied to the development of a 16M-DRAM.