SURFACE-ANALYSIS BY MEANS OF REFLECTION, FLUORESCENCE AND DIFFUSE-SCATTERING OF HARD X-RAY

Layered structures play a fundamental role in modern technology. The c haracterization of these layers includes their composition, compositio n profile and their geometry. The structure of external and internal i nterfaces is of special interest. At grazing incidence, all X-ray tech niques become surface and interface sensitive. This is the basis for a number of novel analytical tools which will be presented in this pape r: X-ray reflection, fluorescence and diffuse scattering. Analytical e xpressions for these three quantities are given. The influence of inte rface roughness is included. The information obtained from these techn iques is the thickness of the layers, their density, the interface rou ghness both perpendicular and parallel to the interface, and the depth profile of the individual atomic species. A number of examples will i llustrate the capability of the techniques. Comparisons with results f rom other techniques will show their advantages and drawbacks.