COMPACT DATA-PROCESSING AND CONTROL-SYSTEM FOR SIMS AND AES

Authors
HILGERS W HERION J ZASTROW U
Citation
W. Hilgers et al., COMPACT DATA-PROCESSING AND CONTROL-SYSTEM FOR SIMS AND AES, Fresenius' journal of analytical chemistry, 346(1-3), 1993, pp. 208-210
Citations number
6
Categorie Soggetti
Chemistry Analytical
Journal title
Fresenius' journal of analytical chemistry → ACNP
ISSN journal
09370633
Volume
346
Issue
1-3
Year of publication
1993
Pages
208 - 210
Database
ISI
SICI code
0937-0633(1993)346:1-3<208:CDACFS>2.0.ZU;2-1
Abstract
An improved version of a data processing and control system has been u sed with state-of-the-art AES and SIMS instruments. It consists of a m ainframe with CPU, buffer and IEEE 488 interface to a host computer an d a range of plug-in submodules. Its features include three-dimensiona l analysis, imaging, multichannel spectra and sample bias control. The performance of the system has been tested by AES and SIMS depth profi le measurements of Si-Ge multilayers.