A STUDY OF LASER-ENHANCED ELECTRODEPOSITI ON PROCESS OF COPPER

Electrodeposition process of copper under a laser beam has been studie d by rotating disk electrode. A laser beam results local temperature r ise at electrode-solution interface, thi leads to: local positive shif t of rest potential, increase in exchange current i0 and charge transf er coefficient alpha, strong microstirring which raises limiting curre nt density. All these changes enhance electrodeposition rates, thus hi gh-speed selective electroplating can be reached.