DIAMOND-LIKE CARBON-FILM DEPOSITION BY SUPER-WIDE ELECTRON-CYCLOTRON-RESONANCE PLASMA SOURCE EXCITED BY TRAVELING MICROWAVE

An electron-cyclotron resonance (ECR) plasma source which generates a long and narrow plasma 500 mm in length has been developed. The plasma is generated by a 2.45 GHz traveling microwave which is supplied thro ugh a slot antenna prepared in the waveguide in a magnetic field gener ated by permanent magnets. Diamond-like carbon (DLC) films were deposi ted in a wide zone 340 mm in width. The variation of film thickness wa s less than 10%. The resistivity of the DLC film was approximately 9.6 2 x 10(11) OMEGA . cm and permittivity, 3.63. The prepared Al/DLC/Si m etal/insulator/semiconductor (MIS) diode revealed fairly good field ef fect in its capacitance-voltage curve.