The Gas desorption on the surface of zinc oxide (0001BAR) after hydrog
en ion irradiation was studied. The desorption gases were measured by
means of temperature programmed desorption (TPD) from room temperature
to 800-degrees-C. Most of the incident hydrogen ions were trapped in
zinc oxide. The trapped hydrogen was desorbed in the form of H-2 and H
2O. The desorption of hydrogen was through a first-order reaction agai
nst hydrogen ion fluence, and the rate-determining process seemed to b
e hydrogen diffusion from the bulk to the surface. The desorption of w
ater vapour which was caused by reaction between oxygen and hydrogen w
as limited by the desorption of hydrogen. When carbon monoxide was int
roduced on the zinc oxide surface under hydrogen ion irradiation, the
hydrogen desorption spectrum was different from that of only hydrogen
irradiation. The difference between these spectra was similar to the d
esorption spectrum with a peak at 530-degrees-C.