CONCENTRATION PROFILE RECONSTITUTION FROM RUTHERFORD BACKSCATTERING SPECTRA

Authors
SERRUYS Y TIRIRA J CALMON P
Citation
Y. Serruys et al., CONCENTRATION PROFILE RECONSTITUTION FROM RUTHERFORD BACKSCATTERING SPECTRA, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 74(4), 1993, pp. 565-572
Citations number
18
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
74
Issue
4
Year of publication
1993
Pages
565 - 572
Database
ISI
SICI code
0168-583X(1993)74:4<565:CPRFRB>2.0.ZU;2-F
Abstract
This paper presents a novel iterative method for concentration profile extraction from Rutherford backscattering spectra, which allows inter pretation up to the best depth resolution allowed by experimental data , without resorting to the usual assumptions underlying existing metho ds. The description of the method is followed by discussion of its con vergence, accuracy and limitations comparison with classical methods o n the basis of experimental examples.