PROPERTIES OF TIN, ZRN AND ZRTIN COATINGS PREPARED BY CATHODIC ARC EVAPORATION

Authors
MUSIL J STEPANEK I MUSIL J KOLEGA M BLAHOVA O VYSKOCIL J KASL J
Citation
J. Musil et al., PROPERTIES OF TIN, ZRN AND ZRTIN COATINGS PREPARED BY CATHODIC ARC EVAPORATION, Materials science & engineering. A, Structural materials: properties, microstructure and processing, 163(2), 1993, pp. 211-214
Citations number
11
Categorie Soggetti
Material Science
Journal title
Materials science & engineering. A, Structural materials: properties, microstructure and processing → ACNP
ISSN journal
09215093
Volume
163
Issue
2
Year of publication
1993
Pages
211 - 214
Database
ISI
SICI code
0921-5093(1993)163:2<211:POTZAZ>2.0.ZU;2-H
Abstract
The paper is devoted to the reactive deposition of TiN, ZrN and ZrTiN coatings prepared by a cathodic arc ion-plating process. Cathodes made of Ti and Zr were evaporated in an N2 atmosphere. ZrTiN coatings were created by simultaneous evaporation of both Ti and Zr. Typical operat ion characteristics of individual depositions are presented. Special a ttention is devoted to the coating properties, namely to the film micr ostructure, surface morphology, phase and chemical composition, microh ardness and adhesion.