COLLISION CASCADES AND SPUTTER FLUXES IN BOUNDED RANDOM-MEDIA

Authors
Citation
Lg. Glazov, COLLISION CASCADES AND SPUTTER FLUXES IN BOUNDED RANDOM-MEDIA, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 122(4), 1997, pp. 611-624
Citations number
24
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
ISSN journal
0168583X
Volume
122
Issue
4
Year of publication
1997
Pages
611 - 624
Database
ISI
SICI code
0168-583X(1997)122:4<611:CCASFI>2.0.ZU;2-#
Abstract
Sputter fluxes in a bounded random medium are considered in comparison with the fluxes for an infinite-medium model. The basic equations con necting the two fluxes are derived and analyzed. It is shown that the fluxes in a bounded medium can be constructed if the infinite-medium o nes are known. Analytical asymptotic formulas for the bounded-medium f lux are found for the simplified case of factorized cross sections and self-bombardment. Explicit dependences of the asymptotic flux on inci dence and exit angles, as well as energy variables, are calculated for the power cross sections and are compared with their infinite-medium counterparts. The results are generalized for a combination of two fac torized scattering laws.