Lg. Glazov, COLLISION CASCADES AND SPUTTER FLUXES IN BOUNDED RANDOM-MEDIA, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 122(4), 1997, pp. 611-624
Sputter fluxes in a bounded random medium are considered in comparison
with the fluxes for an infinite-medium model. The basic equations con
necting the two fluxes are derived and analyzed. It is shown that the
fluxes in a bounded medium can be constructed if the infinite-medium o
nes are known. Analytical asymptotic formulas for the bounded-medium f
lux are found for the simplified case of factorized cross sections and
self-bombardment. Explicit dependences of the asymptotic flux on inci
dence and exit angles, as well as energy variables, are calculated for
the power cross sections and are compared with their infinite-medium
counterparts. The results are generalized for a combination of two fac
torized scattering laws.