T. Gredic et al., EFFECT OF PLASMA NITRIDING ON THE PROPERTIES OF (TI, AL)N COATINGS DEPOSITED ONTO HOT WORK STEEL SUBSTRATES, Thin solid films, 228(1-2), 1993, pp. 261-266
The properties of polycrystalline (Ti, Al)N coatings deposited on non-
nitrided, classically plasma-nitrided and low pressure plasma-nitrided
AISI H11 steel samples were investigated. The plasma deposition and l
ow pressure plasma nitriding were performed in a Z700-LH magnetron spu
tter ion plating unit, while a separate unit was used for plasma nitri
ding of specimens at a pressure of several millibars. The (Ti, Al)N co
ating was deposited onto all the samples using the same equipment as f
or the plasma deposition and low pressure plasma nitriding. For the ch
aracterization of the composite structures, the following methods were
used: scratch test, X-ray diffraction analysis, scanning electron mic
roscopy, scanning tunnelling microscopy and microhardness testing. It
was found that plasma nitriding prior to coating deposition strongly a
ffects the growth and properties of hard coatings, such as the microha
rdness, adhesion, preferred orientation, structure and morphology. Pla
sma nitriding at low pressures has a greater effect than does conventi
onal plasma nitriding: the adhesion is even more enhanced, the microha
rdness is increased, the preferred orientation is more pronounced and
the structure is still columnar but more compact.