DEPOSITION OF WEAR-RESISTANT BN COATINGS BY RF PLASMA-ASSISTED CHEMICAL-VAPOR-DEPOSITION

Thin films of BN have been deposited by r.f plasma-assisted chemical v apour deposition using B2H6-N2-H-2 gas mixtures. The deposited layers were characterized mainly by IR reflection spectroscopy. On the anode, stoichiometric films could only be obtained when a large excess of N2 was present in the gas phase. For films grown at the r.f. plate, the mixing of B2H6 and N2 was less critical. The films were amorphous and had a hexagonal-like short-range order (turbostratic structure). Hardn ess values up to 9 GPa have been obtained for films grown on stainless steel substrates.