The structure of the surface layer of materials is usually quite diffe
rent from the bulk. Detailed information about the surface structure i
s often not available. This, together with the complex nature of low t
emperature plasma treatment, hinders the investigations of plasma chem
ical processes on solid surfaces. Monomolecular Langmuir-Blodgett (LB)
structures offer a unique opportunity to prepare model surfaces with
known thickness and molecular architecture. From the data obtained, th
e depth of the Ar plasma influence on solid organic surfaces was estim
ated to be about 400-1000 angstrom depending on the nature of the surf
ace layer. An oxygen plasma penetrates deeper with a penetration limit
greater than 1000 angstrom. Using plasma treatment, one can improve o
r regulate the properties of the LB structure, e.g. one can introduce
new functionalities and improve thermostability. It is shown that by p
lasma treatment it is possible to prepare thin organoceramic films fro
m metal- or silicon-containing LB films.