CHEMICAL-VAPOR-DEPOSITION OF COPPER FOR MULTILEVEL METALLIZATION

Authors
KALOYEROS AE FURY MA
Citation
Ae. Kaloyeros et Ma. Fury, CHEMICAL-VAPOR-DEPOSITION OF COPPER FOR MULTILEVEL METALLIZATION, MRS bulletin, 18(6), 1993, pp. 22-29
Citations number
59
Categorie Soggetti
Material Science","Physics, Applied
Journal title
MRS bulletin → ACNP
ISSN journal
08837694
Volume
18
Issue
6
Year of publication
1993
Pages
22 - 29
Database
ISI
SICI code
0883-7694(1993)18:6<22:COCFMM>2.0.ZU;2-U