HIGH-RESOLUTION AND HIGH-SENSITIVITY OPTICAL REFLECTION MEASUREMENTS USING WHITE-LIGHT INTERFEROMETRY

Authors
Citation
H. Chou et Wv. Sorin, HIGH-RESOLUTION AND HIGH-SENSITIVITY OPTICAL REFLECTION MEASUREMENTS USING WHITE-LIGHT INTERFEROMETRY, HEWLETT-PAC, 44(1), 1993, pp. 52-59
Citations number
NO
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
HEWLETT-PACKARD JOURNAL
ISSN journal
00181153 → ACNP
Volume
44
Issue
1
Year of publication
1993
Pages
52 - 59
Database
ISI
SICI code
0018-1153(1993)44:1<52:HAHORM>2.0.ZU;2-N
Abstract
In the HP 8504A precision reflectometer white-light interferometry is used as a nondestructive measurement technique for probing closely spa ced reflections in optical devices.