This letter reports the time dependence of the surface Fermi level of
GaAs grown by molecular-beam epitaxy and then exposed to atmosphere. T
he sheet resistance of sample structures for field effect transistors
alternately increased, decreased, increased, and decreased to become n
early constant after about 500 h. These changes correspond to the surf
ace Fermi level varying between 0.3 and 0.7 eV and finally settling 0.
7 eV above the valence band maximum. Comparison between annealed and u
nannealed samples with low-temperature-grown GaAs layers showed that t
he pinning of the surface Fermi level at 0.7 eV above the valence band
maximum is caused by arsenic antisite defects. The result supports th
e advanced unified defect model.