APPLICATION OF METHODS OF FUZZY MATHEMATICS TO THE DETERMINATION OF THE MICROMORPHOLOGY OF TIO2 CVD THIN-FILMS

Authors
VAIJA P LAHOUIDAK J DURAND J COT L
Citation
P. Vaija et al., APPLICATION OF METHODS OF FUZZY MATHEMATICS TO THE DETERMINATION OF THE MICROMORPHOLOGY OF TIO2 CVD THIN-FILMS, Journal of the European Ceramic Society, 11(6), 1993, pp. 551-557
Citations number
5
Categorie Soggetti
Material Science, Ceramics
Journal title
Journal of the European Ceramic Society → ACNP
ISSN journal
09552219
Volume
11
Issue
6
Year of publication
1993
Pages
551 - 557
Database
ISI
SICI code
0955-2219(1993)11:6<551:AOMOFM>2.0.ZU;2-Y
Abstract
The influence of the process parameters (temperature, total pressure, partial pressure of the TiO2 precursor) has been studied. A columnar m orphology is obtained above 500-degrees-C at low pressure, while equia xial crystals are observed at high total pressure. The experimental mo rphology diagram derived from the experimental observations was comple ted applying a simple fuzzy expert system and a fuzzy extrapolation me thod.