VACUUM-ULTRAVIOLET SPECTROSCOPY STUDY OF EXCIMER-LASER-GENERATED PLASMAS

Citation
G. Mehlman et al., VACUUM-ULTRAVIOLET SPECTROSCOPY STUDY OF EXCIMER-LASER-GENERATED PLASMAS, Journal of applied physics, 74(1), 1993, pp. 53-61
Citations number
17
Categorie Soggetti
Physics, Applied
Journal title
ISSN journal
00218979
Volume
74
Issue
1
Year of publication
1993
Pages
53 - 61
Database
ISI
SICI code
0021-8979(1993)74:1<53:VSSOEP>2.0.ZU;2-8
Abstract
The dispersed emission in the vacuum ultraviolet (VUV) (1200-3000 angs trom) from the plasma generated by the interaction of a KrF excimer la ser with an Al and a YBa2Cu3O7 target has been measured. Emission spec tra were collected as a function of distance above the target surface and as a function of laser fluence. The qualitative features of the pl asmas from the two different targets were similar. The character of th e emission spectra changed from a pseudocontinuous emission at the tar get surface to discrete emission from singly, doubly ionized species a s well as neutrals at distances greater than approximately 1.5 mm. The spatial variation indicated two regions: a high-density sheath along the target where the core emission is close to blackbody; and beyond, a plasma with large opacity emitting a UV spectrum of intensity decrea sing fast with distance. Estimates of the plasma temperature and densi ty were between 2 and 4 eV and approximately 10(18)/cm(3), respectivel y.