X-RAY PHOTOELECTRON-SPECTROSCOPY AND AUGER-ELECTRON SPECTROSCOPY STUDIES OF FERROELECTRIC (PB,LA)TIO3 THIN-FILMS PREPARED BY A MULTI-ION-BEAM REACTIVE COSPUTTERING TECHNIQUE
Zh. Qian et al., X-RAY PHOTOELECTRON-SPECTROSCOPY AND AUGER-ELECTRON SPECTROSCOPY STUDIES OF FERROELECTRIC (PB,LA)TIO3 THIN-FILMS PREPARED BY A MULTI-ION-BEAM REACTIVE COSPUTTERING TECHNIQUE, Journal of applied physics, 74(1), 1993, pp. 224-227
X-ray photoelectron spectroscopy and Auger electron spectroscopy studi
es were performed for determining the chemical composition, compositio
nal depth profile, and the chemical bondings of ferroelectric (Pb,La)
TiO3 thin films deposited by a multi-ion-beam reactive cosputtering te
chnique. It was found that the chemical composition of the films and t
he chemical bondings of lead in the near surface region are different
from those in the ''bulk'' region of the films. The films are Pb enric
hed and the lead atoms exist mainly in the forms of PbO(ads) (i.e., ox
ygen-chemisorbed lead) and PbTiO3 in the near surface region, whereas
in the bulk region, the chemical composition is in good agreement with
stoichiometry and lead atoms exist in the form of PbTiO3. It is belie
ved that the effect of Pb enrichment in the near surface regions is an
intrinsic phenomenon of lead-contained thin films, which may be attri
butable to the oxygen-chemisorbed lead.