Ej. Bawolek et al., LIGHT SCATTER FROM POLYSILICON AND ALUMINUM SURFACES AND COMPARISON WITH SURFACE-ROUGHNESS STATISTICS BY ATOMIC-FORCE MICROSCOPY, Applied optics, 32(19), 1993, pp. 3377-3400
Optical-scatter measurements from polysilicon and aluminum surfaces we
re performed by using 632.8-nm illumination at 45 deg and 488-nm illum
ination at 76.8 deg. Scatter was recorded up to 60 deg from the specul
ar beam by using a concentric ring photodetector. The results are comp
ared with surface statastics derived from atomic force microscopy. Qua
ntitative predictions of the scatter were derived from power spectral
density curves and angle-resolved-scattering theory. The agreement was
fair for polysilicon samples with rms surface roughnesses of approxim
ately 18 and 42 nm and aluminum with 17-nm rms roughness but poor for
other samples. The discrepancy is attributed primarily to internal sca
tter within the measuring instrument.