K. Radermacher et al., GROWTH AND ELECTRICAL-PROPERTIES OF ION-IMPLANTED FESI2 ON (111)SI, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 80-1, 1993, pp. 831-834
High dose implantation of Fe+ ions in (111)Si, followed by rapid therm
al annealing at 1150-degrees-C for 10 s was used to grow continuous bu
ried layers of metallic alpha-FeSi2. As verified by transmission elect
ron microscopy, RBS and He ion channeling, these layers are buried wit
h sharp interfaces but with a relatively poor crystal quality (chi(min
) almost-equal-to 60%) and a large number of Fe vacancies (almost-equa
l-to 17%). Electrical measurements provided a specific resistivity of
almost-equal-to 225 muOMEGA cm at room temperature. Beta-FeSi2 layers
have been fabricated by transforming the alpha-FeSi2 layers to beta-Fe
Si2 layers by annealing in a furnace at temperatures below the phase t
ransition temperature (almost-equal-to 950-degrees-C), specifically at
800-degrees-C for 17 h. The existence of nucleation seeds promotes th
is phase transformation. Therefore, we performed subsequent implantati
ons of Fe+ ions in alpha-FeSi2 layers at room temperature prior to the
second annealing.