EFFECT OF THE INCIDENCE GEOMETRY ON THE ION-INDUCED NI-SILICIDES SURFACE COMPOSITIONAL MODIFICATIONS

Ni-silicides surface and subsurface altered layer induced by 1-14 keV Ar+ bombardment with incidence angle between O-degrees and 78-degrees has been studied by Auger electron spectroscopy. Elemental standard me thod was used for quantification, and low energy sputter-profiles prov ided in-depth analysis of the high energy processed surfaces. Differen t incidence of the ion beam results in a weak but detectable change in the surface composition, and also in a different dependence of the su rface composition on the ion energy. The subsurface Si depletion is la rger as the ion beam approaches the normal incidence, while the altere d layer thickness is independent of the impact geometry.