A. Traverse et al., DISORDER CREATION AND ANNEALING IN HG IMPLANTED CDTE, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 80-1, 1993, pp. 938-942
Mercury has been implanted in CdTe single crystals at room temperature
and the damaging process studied by Rutherford backscattering (RBS) o
f He particles in channeling conditions for increasing fluences. Altho
ugh the energy deposited in nuclear collisions is large due to the hea
vy mass of the implanted ion, the disordering mechanism is similar to
the one observed during light ion implantation. Hence, disordering is
mainly governed by CdTe characteristics rather than by nuclear collisi
on parameters. The furnace annealing behavior at different temperature
s has been followed. For T = 400-degrees-C during 2 hours a total dama
ge recovery as characterized by RBS is reached.