ION-IMPLANTATION EFFECTS IN AL2O3 - HYDRATION AND OPTICAL-ABSORPTION

Authors
Citation
Gw. Arnold, ION-IMPLANTATION EFFECTS IN AL2O3 - HYDRATION AND OPTICAL-ABSORPTION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 80-1, 1993, pp. 1036-1039
Citations number
19
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
ISSN journal
0168583X
Volume
80-1
Year of publication
1993
Part
2
Pages
1036 - 1039
Database
ISI
SICI code
0168-583X(1993)80-1:<1036:IEIA-H>2.0.ZU;2-H
Abstract
Implants (Ar, Xe) into alpha-Al2O3 result in H uptake from the ambient atmosphere. The H inventories tended toward maximization at levels be tween 10(21) and 10(22) keV/cm3 with decreased uptake at the higher le vels (10(23)-10(24) keV/cm3). Al implants showed little H incursion be low 10(21) keV/cm3 followed by a near-linear increase with no saturati on observed for the highest deposition values (approximately 10(23) ke V/cm3). Al implants also produce anomalously large F-center concentrat ions due to locally high Al concentrations and track the increases est ablished for H uptake. The optical measurements are compared with thos e for H implants which also yield anomalously large F-center concentra tions.