Gw. Arnold, ION-IMPLANTATION EFFECTS IN AL2O3 - HYDRATION AND OPTICAL-ABSORPTION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 80-1, 1993, pp. 1036-1039
Implants (Ar, Xe) into alpha-Al2O3 result in H uptake from the ambient
atmosphere. The H inventories tended toward maximization at levels be
tween 10(21) and 10(22) keV/cm3 with decreased uptake at the higher le
vels (10(23)-10(24) keV/cm3). Al implants showed little H incursion be
low 10(21) keV/cm3 followed by a near-linear increase with no saturati
on observed for the highest deposition values (approximately 10(23) ke
V/cm3). Al implants also produce anomalously large F-center concentrat
ions due to locally high Al concentrations and track the increases est
ablished for H uptake. The optical measurements are compared with thos
e for H implants which also yield anomalously large F-center concentra
tions.