T. Futagami et al., XPS STUDIES ON THE CHARGE STATES OF CR AND CU ATOMS IMPLANTED INTO ALPHA-AL2O3 AND MGO SINGLE-CRYSTALS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 80-1, 1993, pp. 1168-1170
The charge state of Cr and Cu atoms implanted into alpha-Al2O3 and MgO
single crystals has been studied by X-ray photoelectron spectroscopy
(XPS). The implantation has been performed at 200 and 300 keV to doses
of 10(16) to 10(18)/cm2. The implanted Cr atoms prefer to form aggreg
ates in alpha-Al2O3 implanted to high doses while they are preferentia
lly stabilized as Cr3+ in MgO. The presence of Cu2+ has been observed
only in MgO and the Cu2+ fraction decreases with higher concentration
of implanted Cu atoms.