ZIRCONIUM IMPLANTATION INTO OXYGEN-IMPLANTED IRON

A study has been made of the influence of the iron surface oxide upon carbon incorporation in iron surface layers during Zr+ implantation. O xygen implanted iron was prepared by implantations of non-mass-analyze d oxygen ions into pure iron with acceleration voltages of 3, 6 and 10 kV at room temperature. Zr+ implantation into oxygen implanted iron w as carried out at an energy of 100 keV with a fluence of 5 x 10(16) io ns/cm2. The target temperature and the pressure during Zr+ implantatio n were approximately room temperature and 3 x 10(-3) Pa, respectively. XPS and AES analyses were employed to characterize Zr+ implanted laye rs. It was found that the carbon films were deposited by the combinati on of Zr+ implantation with carbon adsorption, and the interface mixin g between carbon films and iron surfaces took place by Zr+ implantatio n. The depth profiles of carbon atoms near the interface between carbo n film and iron showed that the incorporation of carbon atoms into iro n substrates depended on iron oxide thickness: the C atoms were not in vaded into the iron substrate as the surface oxide layers became thick .