SURFACE-MORPHOLOGY CHANGES IN ION-IMPLANTED CHALCOGENIDE FILMS AFTER ANNEALING

Here we report some results of ion implantation and annealing effects on the surface morphology of thin amorphous films of materials in the As-Se system. Ion implantation with different gaseous ions (Ar+, N+ an d O+) and subsequent annealing have been performed leading to a change in the thin film morphology and the measured optical properties. Opti cal and electronic microscope photographs are presented showing detail s of the rippled film surface. The influence of different types of sub strates on the frost pattern formation is demonstrated and a possible mechanism for the observed effects is discussed.