H. Nagasaka et al., THE PROPERTIES OF TITANIUM NITRIDE PREPARED BY DYNAMIC ION MIXING, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 80-1, 1993, pp. 1380-1383
Titanium nitride films are prepared by Ti evaporation with simultaneou
s nitrogen ion beam irradiation on a martensitic stainless steel. In t
his study, the influences of the phase compositions, interplanar spaci
ngs of the lattice planes and crystal orientation on microhardness are
investigated in relation to process parameters such as ion energy, io
n current, substrate temperature, deposition rate and nitrogen pressur
e. It is recognized that the interplanar spacings of preferred lattice
planes are related to the N/Ti ratios. The results show that the chan
ge in microhardness of titanium nitride films is dependent on the inte
rplanar spacings of these planes.