1ST STAGES STUDY OF HIGH-ENERGY ION-BEAM-ASSISTED DEPOSITION

Authors
ARNAULT JC DELAFOND J TEMPLIER C CHAUMONT J ENEA O
Citation
Jc. Arnault et al., 1ST STAGES STUDY OF HIGH-ENERGY ION-BEAM-ASSISTED DEPOSITION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 80-1, 1993, pp. 1384-1387
Citations number
9
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
80-1
Year of publication
1993
Part
2
Pages
1384 - 1387
Database
ISI
SICI code
0168-583X(1993)80-1:<1384:1SSOHI>2.0.ZU;2-E
Abstract
The first stages of growth of gold layers obtained by high energy IBAD have been investigated. Morphological parameters have been calculated from TEM micrographs with the use of image processing. For low Au dep osit, assisted deposition leads to a lowering of the cluster density w hile an opposite result is obtained for higher Au deposit, resulting f rom an increase of the small clusters part in the double peak size dis tribution. It is interpreted as the result of a competition between en hanced diffusion and ballistic dissolution effects.