Y. Nakagawa et al., TITANIUM NITRIDE FILM FORMATION BY THE DYNAMIC ION-BEAM MIXING METHOD, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 80-1, 1993, pp. 1402-1405
TiN films with a thickness of about 1.0 mum were formed on Si(111) usi
ng the dynamic ion beam mixing method at an acceleration voltage of 2-
30 kV, nitrogen ion current densities of 0.4-5 A/m2, and Ti evaporatio
n rate of about 0.7 nm/s. The Vickers hardness of these films showed h
igh values of 2300-3300 kg/mm2. Film characterizations were performed
using the XRD, TEM, AEM and SIMS methods. An amorphous layer and a pol
ycrystalline TiN layer were sequentially formed on Si substrates. Si,
N and Ti atoms were detected in the amorphous layer. Ti in the amorpho
us layer was thought to be mainly knocked on by N+ and N2+ ions. At 2
and 5 keV nitrogen energy, the thickness of the amorphous layers was 5
and 12 nm, respectively, which corresponds Closely with the projected
range of N+ ions. No clear boundary or void could be observed in the
TiN layer.