TITANIUM-OXIDE FILMS PREPARED BY DYNAMIC ION MIXING

Authors
SETSUHARA Y AOKI H MIYAKE S CHAYAHARA A SATOU M
Citation
Y. Setsuhara et al., TITANIUM-OXIDE FILMS PREPARED BY DYNAMIC ION MIXING, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 80-1, 1993, pp. 1406-1408
Citations number
11
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
80-1
Year of publication
1993
Part
2
Pages
1406 - 1408
Database
ISI
SICI code
0168-583X(1993)80-1:<1406:TFPBDI>2.0.ZU;2-I
Abstract
Titanium oxide films were prepared by dynamic ion mixing, where the fi lms were synthesized by depositing tintanium atoms and simultaneously bombarding with oxygen ions (1-20 keV). A compact dynamic mixing syste m with a bucket-type 2.45-GHz electron-cyclotron-resonance (ECR) ion s ource and an electron beam evaporation source has been used for the fo rmation of the oxide films. The structural analysis by X-ray diffracti on showed that polycrystalline TiO2 films of rutile type were formed a nd that their crystallization was enhanced with increasing ion energy and increasing oxygen pressure during the film growth. Optical and ele ctrical properties of the prepared films are also presented.