As part of a comprehensive program to study the films deposited by mas
s selected ion beam deposition of carbon, initial results of an evalua
tion of the tribological properties are reported. The dynamic friction
coefficient, mu, in unlubricated conditions was measured and was foun
d to decrease with increasing substrate temperature during IBD, above
150-degrees-C. This decrease complemented changes in other film proper
ties, such as density, Raman spectrum and optical transmission which i
ndicated a change from a diamondlike to a more graphitic nature with i
ncreasing temperature. For films deposited at room temperature, the mi
crohardness was found to be about 45 GPa with density very close to th
at of diamond. A minimum value of dynamic friction was observed for io
ns deposited at 120 eV. The results suggest use of the films for prote
ctive coatings; friction coefficients of carbon coated magnetic record
ing disks were measured.