ION STIMULATED DENSIFICATION OF AMORPHOUS-CARBON FILMS

Authors
ULLMANN J WOLF GK MOLLER W
Citation
J. Ullmann et al., ION STIMULATED DENSIFICATION OF AMORPHOUS-CARBON FILMS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 80-1, 1993, pp. 1507-1510
Citations number
16
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
80-1
Year of publication
1993
Part
2
Pages
1507 - 1510
Database
ISI
SICI code
0168-583X(1993)80-1:<1507:ISDOAF>2.0.ZU;2-A
Abstract
Amorphous carbon films were prepared by noble gas ion assisted evapora tion at ion energies between 100 eV and 6 keV and varying ion-to-neutr al arrival ratios. The density of the resulting films was found to inc rease with increasing ion-to-neutral ratio and ion energy. The results are interpreted in terms of a densification which is induced by the r ecombination of ion-induced defects. For this purpose, dynamic binary collision simulations have been performed using the TRIDYN program.