Is. Tashlykov et al., ON THE EFFICIENCY OF DEPOSITED ENERGY DENSITY FOR ION-BEAM MIXING PROCESSES WITH IONS IMPLANTED DURING AND AFTER THIN METAL-FILM DEPOSITION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 80-1, 1993, pp. 98-101
The influence of the energy density deposited in collision cascades (D
ED) on the efficiency of the intermixing processes across bilayer inte
rfaces was studied. The systems under investigation were bilayers of C
u on Al (Cu/Al), Pd/Fe, Cr/Ti, Cu/Ti, W/Ti. The bilayer structures wer
e irradiated with 6-30 keV Ar+, Kr+, Cr+, Cu+, W+ ions at doses up to
3 x 10(16) cm-2 . The value of DED varied from 0.2 to 13 eV/at. The mi
xing profiles were obtained by using the RBS technique. The changes of
relative concentrations of the intermixed components show that for so
me systems the rate of interface mixing increases parallel with DED.