A COMPARISON OF PLASMA IMMERSION ION-IMPLANTATION WITH CONVENTIONAL ION-IMPLANTATION

Plasma immersion ion implantation has a potential advantage over conve ntional line-of-sight ion implantation in being able to provide a unif orm dose over a nonplanar surface. Operating regimes are different for each process leading to different surface modification characteristic s. Comparisons have been made of the two techniques for mild steel, tu ngsten carbide and graphitic carbons. For nitrogen implanted mild stee l, the PI3 process gives a nitrogen depth distribution at least an ord er of magnitude greater than in CI2. In graphitic carbons, CI2 is more effective in producing radiation damage and improving resistance to w ear.