SUPERCONDUCTOR WIRING IN MULTICHIP-MODULE FOR JOSEPHSON LSI CIRCUITS

Nb/polyimide stacked layers on a multilayer ceramic substrate makes it possible to fabricate superconducting off-chip wiring for control sig nal lines. This superconducting multichip module (SuperMCM) also provi des matching circuits for the clock signal and DC bias circuits beneat h the superconducting transmission lines. The first prototype SuperMCM in the world successfully made,which has been designed to drive Josep hson LSI chips at the highest clock frequency of 1.2 GHz.