Y. Suzuki et al., LAUE-CASE PLANE-WAVE TOPOGRAPHY USING SYNCHROTRON-RADIATION TO REVEALMICRODEFECTS IN A THINNED SILICON CRYSTAL, JPN J A P 2, 32(7A), 1993, pp. 958-961
X-ray plane-wave topography in a Laue-transmission case has been widel
y used to observe microdefects in otherwise perfect silicon crystals.
To show the experimental effect of specimen thickness, plane-wave topo
graphic observations were conducted before and after the stepwise chem
ical etching of the specimen crystal. The observations showed a height
ening of the strain sensitivity when reducing the specimen thickness t
o less than several times the extinction distance of the relevant diff
raction. The thickness eff ect was interpreted through X-ray dynamical
diffraction theory for distorted crystals (Takagi-Taupin theory). The
computer simulations of the diffraction theory proved that correlatio
ns exist amongst the divergence of the incident X-ray beams, the cryst
al thickness, and the quantity of the minute strain.