Dj. Larson et al., COMPOSITIONAL, STRAIN CONTOUR AND PROPERTY MAPPING OF CDZNTE BOULES AND WAFERS, Semiconductor science and technology, 8(6), 1993, pp. 911-915
We have developed detailed non-destructive mapping and spatial imaging
techniques for comparing boule and wafer properties with analytical p
redictions from high-fidelity process models for seeded vertical Bridg
man-Stockbarger growth of CdZnTe crystals. We have emphasized the pred
iction of the magnitude and distribution of residual stress and strain
, as well as longitudinal and radial segregation within the boules and
across wafers cut from the boules. Boule and wafer compositional dist
ributions were mapped using photoreflectance, precision lattice parame
ter measurements and FTIR spectroscopy. Defect and strain distribution
s within the boules and wafers were imaged using synchrotron topograph
y, synchrotron strain contour mapping, and double-crystal rocking-curv
e mapping Thermomechanical and thermosolutal models specifically addre
ssing the seeded vertical Bridgman-Stockbarger growth of CdZnTe crysta
ls were developed and empiricized. These models addressed solute redis
tribution and stress generation as a result of the interface shape, as
pect ratio and growth parameters during the seeding, initial transient
(including the shoulder), steady-state and terminal transient regions
of the boule Finally, the stress and strain distributions on specific
wafers 'cut' from the processed (modelled) boules were predicted and
x-ray synchrotron strain contour, double-crystal rocking-curve, FTIR,
and photoreflectance maps were generated on the real wafers for compar
ison. Implications of these results with respect to substrate quality,
screening, performance and producibility, will be discussed.