STRUCTURE OF SILICON DEPOSITS OBTAINED BY ELECTROLYZING MIXED CHLORIDE FLUORIDE MELTS

Authors
FROLENKO DB MARTEMYANOVA ZS VALEEV ZI BARABOSHKIN AN
Citation
Db. Frolenko et al., STRUCTURE OF SILICON DEPOSITS OBTAINED BY ELECTROLYZING MIXED CHLORIDE FLUORIDE MELTS, Soviet electrochemistry, 28(12), 1992, pp. 1427-1434
Citations number
13
Categorie Soggetti
Electrochemistry
Journal title
Soviet electrochemistry → ACNP
ISSN journal
00385387
Volume
28
Issue
12
Year of publication
1992
Pages
1427 - 1434
Database
ISI
SICI code
0038-5387(1992)28:12<1427:SOSDOB>2.0.ZU;2-C
Abstract
The structure of silicon deposits obtained on different polycrystallin e and single-crystal substrate materials by electrolyzing mixed chlori de-fluoride melts was studied as a function of temperature and cathodi c current density. It was shown that thick, compact layers of polycrys talline and single-crystal silicon can be produced.