By far, the largest thermally stimulated current trap in molecular bea
m epitaxial GaAs grown at 200-250-degrees-C is T5, with an activation
energy of 0.27 eV and most likely related to V(Ga). After an anneal at
300-350-degrees-C, another trap T6star appears, with an activation en
ergy of 0.14 eV and closely identified with V(As) or the complex, V(As
)-As(Ga). Proposed defect reactions in this As-rich material include V
(Ga) + As(As) --> V(As)-As(Ga), and V(Ga) + As(Ga) --> V(Ga)-As(Ga).