MANUFACTURE AND EXAMINATION OF VARIOUS SPIN-ON GLASS-FILMS WITH RESPECT TO THEIR HUMIDITY-SENSITIVE PROPERTIES

Authors
LIN J HEURICH M OBERMEIER E
Citation
J. Lin et al., MANUFACTURE AND EXAMINATION OF VARIOUS SPIN-ON GLASS-FILMS WITH RESPECT TO THEIR HUMIDITY-SENSITIVE PROPERTIES, Sensors and actuators. B, Chemical, 13(1-3), 1993, pp. 104-106
Citations number
3
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. B, Chemical → ACNP
ISSN journal
09254005
Volume
13
Issue
1-3
Year of publication
1993
Pages
104 - 106
Database
ISI
SICI code
0925-4005(1993)13:1-3<104:MAEOVS>2.0.ZU;2-Q
Abstract
SiO2 films produced by the sol-gel method were optimized with respect to their pore size and pore distribution so that these films are suita ble for use as a basic material for thin-film humidity sensors. A capa citive humidity sensor is described which is distinguished by good rev ersibility, high sensitivity, good linearity, short response time (< 1 0 s) and low cross-sensitivity towards other gases (SO2, CO2, NH3).