METHOD OF FABRICATION OF ISFETS AND CHEMFETS ON AN SI-SIO2-SI STRUCTURE

Authors
Citation
As. Poghossian, METHOD OF FABRICATION OF ISFETS AND CHEMFETS ON AN SI-SIO2-SI STRUCTURE, Sensors and actuators. B, Chemical, 14(1-3), 1993, pp. 653-654
Citations number
5
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
ISSN journal
09254005
Volume
14
Issue
1-3
Year of publication
1993
Pages
653 - 654
Database
ISI
SICI code
0925-4005(1993)14:1-3<653:MOFOIA>2.0.ZU;2-U