OPTIMIZED PROTON IMPLANTATION STEP FOR VERTICAL-CAVITY SURFACE-EMITTING LASERS

Authors
RESSEL P STRUSNY H GRAMLICH S ZEIMER U SEBASTIAN J VOGEL K
Citation
P. Ressel et al., OPTIMIZED PROTON IMPLANTATION STEP FOR VERTICAL-CAVITY SURFACE-EMITTING LASERS, Electronics Letters, 29(10), 1993, pp. 918-919
Citations number
5
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Electronics Letters → ACNP
ISSN journal
00135194
Volume
29
Issue
10
Year of publication
1993
Pages
918 - 919
Database
ISI
SICI code
0013-5194(1993)29:10<918:OPISFV>2.0.ZU;2-Y
Abstract
The influence of proton implantation in the distributed Bragg reflecto rs of vertical-cavity surface-emitting laser structures has been studi ed via measurement of the photoluminescence for different implantation and annealing conditions. It is shown that by optimal annealing the i solating layer can be positioned close to the active region with no de tectable deterioration of photoluminescence.