HCL-GAS DISTRIBUTION-SYSTEMS - THE EFFECT OF SURFACE FINISH AND POINT-OF-USE PURIFICATION

Authors
DUGUID R CODER S BINDER R HERTZLER B
Citation
R. Duguid et al., HCL-GAS DISTRIBUTION-SYSTEMS - THE EFFECT OF SURFACE FINISH AND POINT-OF-USE PURIFICATION, Solid state technology, 36(7), 1993, pp. 79
Citations number
3
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied","Physics, Condensed Matter
Journal title
Solid state technology → ACNP
ISSN journal
0038111X
Volume
36
Issue
7
Year of publication
1993
Database
ISI
SICI code
0038-111X(1993)36:7<79:HD-TEO>2.0.ZU;2-7
Abstract
The effect of system surface finish on H2O desorption in both inert an d HCI gas streams can be significant in stainless steel ultrahigh-puri ty (UHP) gas distribution systems. HCI gas can displace moisture previ ously adsorbed on distribution system surfaces and actually return moi sture to the HCI gas stream [1,2]. In a system that has been previousl y dried and is leak tight, this will exacerbate an already challenging corrosion problem. This paper examines H2O desorption in systems with 7-Ra and 15-Ra 316L stainless steel surface finishes.