MAGNETIC-PROPERTIES OF SPUTTERED FE THIN-FILMS - PROCESSING AND THICKNESS DEPENDENCE

The microstructure and magnetic properties of polycrystalline Fe films with thicknesses of 200-1000 angstrom have been investigated. The fil ms were prepared by rf sputtering onto SiO2 substrates. The investigat ion was prompted by the lack of data on sputtered Fe films in this thi ckness regime as well as disagreement in the data for evaporated films . In addition to thickness, substrate temperature and deposition press ure were varied to examine their effect on the microstructure. The fil m microstructure was characterized by x-ray diffraction, transmission electron microscopy, and Auger spectroscopy. The polycrystalline films did not display a strong preferred orientation and had average grain sizes of 60-85 angstrom. Surface oxide layers formed upon exposure to air ranged from 10 to 80 angstrom, the thicker oxides formed on films with lower density. Magnetic hysteresis measurements were made with a vibrating sample magnetometer. Below 1000 angstrom, porosity and surfa ce oxidation result in reductions up to 15% in the saturation magnetiz ation. An anomalous peak in coercivity at film thicknesses of 300-500 angstrom was observed, which can be explained by the change in domain wall type.