A new experimental geometry for simultaneously mapping the rocking cur
ves of a sample over a one- or two-dimensional array of points on the
sample has been developed. The 422 asymmetric diffraction of Cu K(alph
a1) radiation with a monolithic channel-cut silicon crystal angularly
collimates and spatially expands the x-ray beam. A cooled Reticon line
ar photodiode array with 25-mum spatial resolution was used for the on
e-dimensional detector. Compared with the commonly used double-crystal
diffractometer method, more information can be obtained from the pres
ent method, for example, characterization of the minute local misorien
tation of subgrains and the precise determination of the curvature of
a crystal. The uniformity of the crystal quality and the local variati
on of the curvature of the crystal planes over a sample can also be re
vealed from the contour map of the rocking curves. Maps of the rocking
curves of several samples have been collected using this method.